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Handbook of Semiconductor Manufacturing Technology
by Yoshio Nishi
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Amazon.com Product Description (ISBN 0824787838, Hardcover)The Handbook of Semiconductor Manufacturing Technology describes the individual processes and manufacturing control, support, and infrastructure technologies of silicon-based integrated-circuit manufacturing, many of which are also applicable for building devices on other semiconductor substrates. Discussing ion implantation, rapid thermal processing, photomask fabrication, chip testing, and plasma etching, the editors explore current and anticipated equipment, devices, materials, and practices of silicon-based manufacturing. The book includes a foreword by Jack S. Kilby, cowinner of the Nobel Prize in Physics 2000 "for his part in the invention of the integrated circuit."
(retrieved from Amazon Thu, 12 Mar 2015 18:07:23 -0400)
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